Date of Award

1-1-2012

Language

English

Document Type

Dissertation

Degree Name

Doctor of Philosophy (PhD)

College/School/Department

Department of Nanoscale Science and Engineering

Program

Nanoscale Engineering

Content Description

1 online resource (xxvi, 113 pages) : illustrations (some color)

Dissertation/Thesis Chair

Alain C Diebold

Committee Members

Ji Ung Lee, Kathleen Dunn, Carl Ventrice, Robert Hull

Keywords

Dielectric Function, Electron Energy Loss Spectroscopy, Graphene, Scanning Transmission Electron Microscopy, Spectroscopic Ellipsometry, Electron energy loss spectroscopy, Ellipsometry, Dielectrics, Nanoelectronics

Subject Categories

Nanoscience and Nanotechnology

Abstract

For more than 60 years, semiconductor research has been advancing up the periodic table. The first transistor was made from germanium. This later gave way to silicon-based devices due to the latter's ability to form an excellent interface with thermally-grown oxide. Now for the last ~8 years, the focus has moved up one more row to carbon for post-CMOS devices in order to comply with the scaling limitations of Moore's law. However, for each of these, the measurements of film properties and dimensions have always been required for technological applications. These measurement methods often incorporate the use of light or electrons in order to take advantage of a wavelength that is on the order of, or smaller than, the feature sizes of interest.

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