Date of Award
1-1-2015
Language
English
Document Type
Dissertation
Degree Name
Doctor of Philosophy (PhD)
College/School/Department
Department of Physics
Content Description
1 online resource (vii, 91 pages) : color illustrations.
Dissertation/Thesis Chair
Carolyn MacDonald
Committee Members
Carolyn MacDonald, Hassaram Bakhru, Mengbing Huang, John Kimball, William Lanford
Keywords
Co doping and Hot temperature Implant, Diffusion activation Energy, Dopant Diffusion and impuruty interaction, Mathematical modeling, Meyer Neldel Rule, RBS angular scan, Runtherford Backscattering Spectroscopy (RBS), Ion implantation, Semiconductor doping, Zinc oxide, Diffusion
Subject Categories
Engineering | Materials Science and Engineering | Physics
Abstract
In the first part of this research we studied the entropy changes in diffusion prefactor and its
Recommended Citation
Yaqoob, Faisal, "Ion implantation in ZnO : defect interaction and impurity diffusion" (2015). Legacy Theses & Dissertations (2009 - 2024). 1546.
https://scholarsarchive.library.albany.edu/legacy-etd/1546