Date of Award

1-1-2015

Language

English

Document Type

Dissertation

Degree Name

Doctor of Philosophy (PhD)

College/School/Department

Department of Nanoscale Science and Engineering

Program

Nanoscale Engineering

Content Description

1 online resource (ix, 150 pages) : color illustrations.

Dissertation/Thesis Chair

Gregory P Denbeaux

Committee Members

Obert Wood, Ji Ung Lee, Robert Brainard

Keywords

deconvolution, electron, PSF, resolution, restoration, SEM, Electron beams, Scanning electron microscopy

Subject Categories

Materials Science and Engineering | Nanoscience and Nanotechnology

Abstract

Electron beams are useful in many applications because they can be focused down to a spot far exceeding the physical limit of focusing visible light or x-rays. Additionally, electron beams are useful in transferring concentrated amounts of energy to a very small well defined region of a target for a fixed duration. This has led to the development of both scanning electron microscopes (SEMs) and electron beam lithography. The goal of this work was to develop a general method that accurately and easily yields the best estimate of the electron current density distribution of a focused electron beam, known as point spread function (PSF). The method developed is fast, easy to use and accurate.

Download

Share

COinS