Date of Award
1-1-2014
Language
English
Document Type
Dissertation
Degree Name
Doctor of Philosophy (PhD)
College/School/Department
Department of Nanoscale Science and Engineering
Program
Nanoscale Sciences
Content Description
1 online resource (ix, 128 pages) : color illustrations.
Dissertation/Thesis Chair
Sara Brenner
Committee Members
Thomas Begley, J A Melendez, Yubing Xie, Alan Rossner
Keywords
engineered nanomaterials, nanoparticle, occupational exposure assessment, risk assessment, semiconductor industry, Chemical mechanical planarization, Nanostructured materials, Nanoparticles, Semiconductor wafers
Subject Categories
Environmental Health | Nanoscience and Nanotechnology | Occupational Health and Industrial Hygiene
Abstract
Engineered nanomaterials (ENMs) are currently used in hundreds of commercial products and industrial processes, with more applications being investigated. Nanomaterials have unique properties that differ from bulk materials. While these properties may enable technological advancements, the potential risks of ENMs to people and the environment are not yet fully understood. Certain low solubility nanoparticles are more toxic than their bulk material, such that existing occupational exposure limits may not be sufficiently protective for workers. Risk assessments are currently challenging due to gaps in data on the numerous emerging materials and applications as well as method uncertainties and limitations.
Recommended Citation
Shepard, Michele, "Exposure assessment and risk management of engineered nanoparticles : investigation in semiconductor wafer processing" (2014). Legacy Theses & Dissertations (2009 - 2024). 1268.
https://scholarsarchive.library.albany.edu/legacy-etd/1268
Included in
Environmental Health Commons, Nanoscience and Nanotechnology Commons, Occupational Health and Industrial Hygiene Commons