Date of Award




Document Type


Degree Name

Doctor of Philosophy (PhD)


Department of Nanoscale Science and Engineering


Nanoscale Sciences

Content Description

1 online resource (x, 107 pages) : illustrations (some color)

Dissertation/Thesis Chair

Timothy Groves

Committee Members

Gregory Denbeaux, Eric Lifshin, John Hartley, Nigel Crosland


Electron Beam, Lithography, Muti-beam, Nanodot, Photoemission, Surface Plasmons, Lithography, Electron beam

Subject Categories

Electromagnetics and Photonics | Optics | Physics


Surface plasmon polariton (SPP) assisted photoelectron source array is proposed for use in distributed multiple electron beam lithography applications. Individual source is composed of a metal/dielectric surface structure with concentric circular grooves of subwavelength width surrounding a sub-wavelength aperture. Such optical power concentrators, called "plasmonic lenses", collect light incident over a broad area by converting it to surface electromagnetic waves, specifically SPP's, through diffraction by the sub-wavelength grooves surrounding the aperture. Through constructive interference of the generated SPPs between neighboring grooves, controlled by the periodicity of the grooves, high optical power densities can be achieved at the center of the lens near the aperture. This facilitates high transmission of optical power through the aperture which results in more light being transmitted than is incident on the aperture itself. Such an approach results in a focal spot at the exit side of the aperture with highly enhanced optical power density compared to the incident light.