Date of Award




Document Type

Master's Thesis

Degree Name

Master of Science (MS)


Department of Chemistry

Content Description

1 online resource (ii, xiii, 95 pages)

Dissertation/Thesis Chair

Marina A Petrukhina

Committee Members

Paul J Toscano


Cobalt, Copper, Diketonate, Fluorinated, X-Ray Crystallography, Metal complexes, Copper compounds, Cobalt compounds, Ligands

Subject Categories

Chemistry | Inorganic Chemistry | Materials Science and Engineering


β-Diketones are well known to form metal complexes with practically every known metal and metalloid. Metal complexes of fluorinated β-diketones generally exhibit increased volatility and thermal stability compared to the non-fluorinated analogues, and thus are used extensively in various chemical vapor deposition (CVD) processes for the deposition of metal, simple or mixed metal oxides, and fluorine-doped metal oxide thin films. Furthermore, the electron-withdrawing nature of the fluorinated ligand enhances the Lewis acidity of a coordinatively unsaturated metal center which facilitates additional coordination reactions. The physical and structural properties of fluorinated β-diketonate complexes are discussed in Chapter 1 and a few key application examples are given.