Date of Award


Document Type

Honors Thesis

Degree Name

Bachelor of Science


Nanoscale Science

Advisor/Committee Chair

Benjamin Briggs

Committee Member

Nathaniel Cady


Resistive Random Access Memory (ReRAM) has attracted much attention among researchers due to its fast switching speeds, lower switching voltages, and feasible integration into industry compatible CMOS processing. These characteristics make ReRAM a viable candidate for next-generation Non- Volatile Memory. Transition-Metal-Oxides have been proven to be excellent materials for ReRAM applications. This work investigates the effect of various, post-deposition anneals (PDA) on the switching parameters of Ni/Cu/HfO2/TiN Resistive Memory Devices (RMD). Results are presented in the form of a Small Business Innovation Research (SBIR) grant proposal. The use of the SBIR format emphasizes understanding of the experimental design, commercial viability, and broader impacts of ReRAM technology.