Date of Award
12-1-2023
Language
English
Document Type
Dissertation
Degree Name
Doctor of Philosophy (PhD)
College/School/Department
Department of Nanoscale Science and Engineering
Dissertation/Thesis Chair
Robert L Brainard
Committee Members
Robert Brainard, Gregory Denbeaux, Scott Tenenbaum, Jeremy Feldblyum, Michael Murphy
Keywords
Diffusion, Polymer, Reaction, Solubility
Subject Categories
Polymer Chemistry
Abstract
Microelectronics manufacturing of modern devices has required the use of polymer photoresists in several essential steps. The traditional limitation in device capability has been dependent on the minimum feature size attainable by the wavelength of light and materials used in photolithography. In this thesis the study of polymer thin films in single and bilayer stacks is described. Three scientific concepts are fundamental to this study: (1) the diffusion and (2) reaction of acid and small molecules that change polymer (3) solubility. In this thesis, two chemical systems are designed and used to study these three scientific concepts.
Recommended Citation
Sitterly, Jacob, "Solubility, Reactivity And Diffusion In Polymeric Bilayer Thin Films" (2023). Legacy Theses & Dissertations (2009 - 2024). 3244.
https://scholarsarchive.library.albany.edu/legacy-etd/3244
