Fabrication and characterization of nanomaterials grown by electron beam induced deposition process

Author

Juntao Li, University at Albany, State University of New YorkFollow

Date of Award

1-1-2010

Language

English

Document Type

Dissertation

Degree Name

Doctor of Philosophy (PhD)

College/School/Department

Department of Nanoscale Science and Engineering

Program

Nanoscale Sciences

Content Description

1 online resource (xvii, 241 pages) : PDF file, illustrations (some color)

Dissertation/Thesis Chair

Bradley Thiel

Committee Members

Eric Lifshin, Eric Eisenbraun, Richard Matyi, Christopher Arumainayagam

Keywords

Nanostructured materials, Electron microscopy

Subject Categories

Materials Science and Engineering | Nanoscience and Nanotechnology

Abstract

Platinum&ndash and tungsten&ndashcontaining materials were grown on bulk substrates from a variety of precursors including (CH₃)₃CH₃C₅H₄Pt, W(CO)₆, WF₆, and Pt(PF₃)₄ in either a high vacuum dual beam focused ion beam/scanning electron microscope (FIB&ndashSEM) or an environmental scanning electron microscope (ESEM). The effects of deposition conditions on the growth kinetics, microstructure and composition of the grown materials, structural and chemical homogeneity of impurities inside the deposits as well as the resistivity were investigated.

Recommended Citation

Li, Juntao, "Fabrication and characterization of nanomaterials grown by electron beam induced deposition process" (2010). Legacy Theses & Dissertations (2009 - 2024). 208.
https://scholarsarchive.library.albany.edu/legacy-etd/208